Installation Manual Plasma Pro 100: PDF
For dry etching of many materials (semiconductors, metals, dielectrics) thanks to different gas lines (Cl2, BCl3, Ar, SF6, C4F8, O2, CH4, H2) and the cryogenic option
Installation Manual Plasma Pro 100: PDF
For dry etching of many materials (semiconductors, metals, dielectrics) thanks to different gas lines (Cl2, BCl3, Ar, SF6, C4F8, O2, CH4, H2) and the cryogenic option