Micro Raman spectrometer (LabRAM HR Evolution)
Raman spectroscopy is a very strong technique to identify different materials. In particular, it is indispensable for the identification of…
Raman spectroscopy is a very strong technique to identify different materials. In particular, it is indispensable for the identification of…
For dry etching of many materials (semiconductors, metals, dielectrics) thanks to different gas lines (Cl2, BCl3, Ar, SF6, C4F8, O2,…
For the treatment of the (ebeam or optical) resist. Typical process: At the beginning the resist is deposited by the…
Manuals: User Manual
Imaging with InLens and SE2 detectors Nanolithography with a nanometric resolution for the alignment of the ebeam